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Stress measurements using ultraviolet micro-Raman spectroscopy.
- Source :
-
Applied Physics Letters . 10/18/1999, Vol. 75 Issue 16, p2450. 2p. 2 Graphs. - Publication Year :
- 1999
-
Abstract
- Studies the stress measurements using ultraviolet micro-Raman spectroscopy. Raman spectrum of the first-order silicon phonon; Comparison of stress patterns measured; Detection of localized stresses averaged out by longer wavelength light.
- Subjects :
- *RAMAN spectroscopy
*ULTRAVIOLET radiation
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 75
- Issue :
- 16
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 4212061
- Full Text :
- https://doi.org/10.1063/1.125044