Gettering of copper to hydrogen-induced cavities in silicon.

MLA

Wong-Leung, J., and C. E. Ascheron. “Gettering of Copper to Hydrogen-Induced Cavities in Silicon.” Applied Physics Letters, vol. 66, no. 10, Mar. 1995, p. 1231. EBSCOhost, https://doi.org/10.1063/1.113246.

APA

Wong-Leung, J., & Ascheron, C. E. (1995). Gettering of copper to hydrogen-induced cavities in silicon. Applied Physics Letters, 66(10), 1231. https://doi.org/10.1063/1.113246

Chicago

Wong-Leung, J., and C.E. Ascheron. 1995. “Gettering of Copper to Hydrogen-Induced Cavities in Silicon.” Applied Physics Letters 66 (10): 1231. doi:10.1063/1.113246.