Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum....

Examines the preferred orientation of polycrystalline TiN films grown by ultrahigh-vacuum reactive-magnetron sputtering. Function of TiN films deposition of reactive magnetron sputtering; Importance of the presence of large intrinsic film stresses in determining TiN preferred orientation; Variety of kinetic effects associated with growth process.