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Incorporation kinetics of rare-earth metals in Si during molecular beam epitaxy.

Authors :
Miyashita, K.
Shiraki, Y.
Source :
Applied Physics Letters. 7/10/1995, Vol. 67 Issue 2, p235. 3p. 5 Graphs.
Publication Year :
1995

Abstract

Investigates the incorporation kinetics of rare earth metals in silicon during molecular beam epitaxy (MBE). Application of ion mass spectrometry; Surface segregation on rare earth metals in normal MBE growth; Implication of segregant-assisted growth using antimony for surface segregation reduction.

Details

Language :
English
ISSN :
00036951
Volume :
67
Issue :
2
Database :
Academic Search Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
4167913
Full Text :
https://doi.org/10.1063/1.114678