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Detection of oxygen incorporated in molecular-beam epitaxy grown GaAs-on-AlAs interfaces and....

Authors :
Someya, T.
Akiyama, H.
Source :
Applied Physics Letters. 10/4/1993, Vol. 63 Issue 14, p1924. 3p. 1 Diagram, 3 Graphs.
Publication Year :
1993

Abstract

Determines the concentration of oxygen incorporated in GaAs/AlAs (gallium arsenide) interfaces and AlAs layers by secondary ion mass spectrometry (SIMS). Importance of minimizing the impurity incorporation from residual gas species in molecular-beam epitaxy; Details on the number of oxygen atoms adsorbed on the AlAs surfaces during growth interruption; Advantages of SIMS.

Details

Language :
English
ISSN :
00036951
Volume :
63
Issue :
14
Database :
Academic Search Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
4164252
Full Text :
https://doi.org/10.1063/1.110650