Target-quality dependent crystallinity of sputter-deposited LiNbO3 films: Observation of impurity segregation

MLA

Akazawa, Housei. “Target-Quality Dependent Crystallinity of Sputter-Deposited LiNbO3 Films: Observation of Impurity Segregation.” Thin Solid Films, vol. 517, no. 19, Aug. 2009, pp. 5786–92. EBSCOhost, https://doi.org/10.1016/j.tsf.2009.04.032.

APA

Akazawa, H. (2009). Target-quality dependent crystallinity of sputter-deposited LiNbO3 films: Observation of impurity segregation. Thin Solid Films, 517(19), 5786–5792. https://doi.org/10.1016/j.tsf.2009.04.032

Chicago

Akazawa, Housei. 2009. “Target-Quality Dependent Crystallinity of Sputter-Deposited LiNbO3 Films: Observation of Impurity Segregation.” Thin Solid Films 517 (19): 5786–92. doi:10.1016/j.tsf.2009.04.032.