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Fabrication of electro optical nano modulator on silicon chip

Authors :
Limon, Ofer
Businaro, Luca
Gerardino, Annamaria
Bitton, Liora
Frydman, Aviad
Zalevsky, Zeev
Source :
Microelectronic Engineering. Apr2009, Vol. 86 Issue 4-6, p1099-1102. 4p.
Publication Year :
2009

Abstract

Abstract: In this paper, we present the fabrication and preliminary measurements of a novel electro optical nano modulator on silicon chip based on light scattering by a movable 50nm charged gold colloid particle. The idea is to modulate the 1.55μm light by electrically manipulating the highly conductive particle in a nano air gap created in a silicon waveguide to cause high scattering and absorption. With a length of 150nm of the air gap, the expected modulation rates can exceed few GHz while being implemented on a highly dense silicon chip. [Copyright &y& Elsevier]

Details

Language :
English
ISSN :
01679317
Volume :
86
Issue :
4-6
Database :
Academic Search Index
Journal :
Microelectronic Engineering
Publication Type :
Academic Journal
Accession number :
39778854
Full Text :
https://doi.org/10.1016/j.mee.2009.01.007