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A Percolative Approach to Reliability of Thin Films.
- Source :
-
IEEE Transactions on Electron Devices . Oct2000, Vol. 47 Issue 10, p1986. 6p. 3 Black and White Photographs, 2 Diagrams, 6 Graphs. - Publication Year :
- 2000
-
Abstract
- Presents a theoretical study of the degradation toward failure of metallic and insulating thin films. Description of the failure of metallic interconnects and dielectric degradation; Procedure in using the Monte Carlo simulations; Results of the simulation.
- Subjects :
- *THIN films
*METALLIC films
*MONTE Carlo method
*SYSTEM failures
Subjects
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 47
- Issue :
- 10
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- 3683581
- Full Text :
- https://doi.org/10.1109/16.870586