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Shrinking solid-state nanopores using electron-beam-induced deposition.
- Source :
-
Nanotechnology . Mar2009, Vol. 20 Issue 11, p15302-15302. 1p. - Publication Year :
- 2009
-
Abstract
- Solid-state nanopores of only a few nanometres in size show a great potential for applications such as molecule detection and DNA sequencing. In most cases, the fabrication of such a nanopore requires the high energy beam of a transmission electron microscope (TEM) or focused ion beam (FIB) tool to drill or reshape a small hole in a freestanding membrane. Here, we present a novel method to reduce the size of existing nanopores using electron-beam-induced deposition (EBID) of carbon in a conventional scanning electron microscope (SEM). The existing nanopores are etched in a silicon membrane using anisotropic wet etching and can be shrunk down to a few nanometres using EBID. This paper discusses the parameters that influence the rate of shrinking and provides an insight into the underlying mechanism. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09574484
- Volume :
- 20
- Issue :
- 11
- Database :
- Academic Search Index
- Journal :
- Nanotechnology
- Publication Type :
- Academic Journal
- Accession number :
- 36651796
- Full Text :
- https://doi.org/10.1088/0957-4484/20/11/115302