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High resolution transmission electron microscopy study of iron-silicide nanodot structures grown on faintly oxidized Si (111) surfaces
- Source :
-
Thin Solid Films . Mar2009, Vol. 517 Issue 9, p2865-2870. 6p. - Publication Year :
- 2009
-
Abstract
- Abstract: Epitaxial iron-silicide (α-FeSi2, ε-FeSi and β-FeSi2) nanodots were grown on Si(111) substrates with SiO2 ultrathin films by Fe deposition on Si nanodots. The nanodots were characterized in-situ by reflection high-energy electron diffraction and scanning tunneling microscopy, and ex-situ high resolution transmission electron microscopy (HRTEM). For the β-FeSi2 nanodots, the HRTEM images and the corresponding fast Fourier transform patterns analyses revealed that the coherent β-FeSi2 nanodots with a relation of β-FeSi2(110)/Si(111) had a compressive strain of ~0.8% in the [001] β -FeSi2 direction and a tensile strain of ~2.6% in the direction normal to (110) β -FeSi2 plane. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 00406090
- Volume :
- 517
- Issue :
- 9
- Database :
- Academic Search Index
- Journal :
- Thin Solid Films
- Publication Type :
- Academic Journal
- Accession number :
- 36563857
- Full Text :
- https://doi.org/10.1016/j.tsf.2008.10.057