INCIDENCIA DE LA NITRURACIÓN POR PLASMA Y SALES EN LAS PROPIEDADES MECÁNICAS DE PELÍCULAS DE TiN Y BICAPAS DE Ti-TiN CRECIDAS POR SPUTTERING MAGNETRÓN RF SOBRE ACERO 420.

In this work, we report micro-hardness measurement of the thin films of TiN with thickness of 0.8 µm and bilayers of Ti-TiN with 1,2µm of thicknesses, growth onto steel AISI 420 by rf magnetron sputtering, based on the superficial preparation of the steel, for two cases: nitrurated by plasma and nitrurated with salts. The obtained films have been characterized through scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX), X-ray diffraction (DRX) and measured of micro-hardness. [ABSTRACT FROM AUTHOR]