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Bianalyte mass detection with a single resonant microcantilever.
- Source :
-
Applied Physics Letters . 1/5/2009, Vol. 94 Issue 1, p011901. 3p. 1 Black and White Photograph, 2 Charts, 1 Graph. - Publication Year :
- 2009
-
Abstract
- Mass-loading detection of multiple kinds of analyte with a single resonant microcantilever is proposed and experimentally validated. By exciting the cantilever in different resonance modes and adsorbing the different analytes at different locations of the cantilever, the specific mass of either kind of analyte can be independently detected. The proposed micromechanical resonant cantilever sensor is designed and fabricated using silicon micromachining techniques. Used as simulant adsorbates, Au and Cr thin films are selectively implemented on the cantilever to verify the bianalyte detecting function. The testing results are consistent with the theoretical analysis, with the detection error being an order of magnitude lower than the analyzed mass. [ABSTRACT FROM AUTHOR]
- Subjects :
- *CANTILEVERS
*MICROMACHINING
*DETECTORS
*RESONANCE
*THIN films
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 94
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 36178266
- Full Text :
- https://doi.org/10.1063/1.3050460