Back to Search
Start Over
Quantitative static Time-of-Flight Secondary Ion Mass Spectrometry analysis of anionic minority species in microelectronic substrates
- Source :
-
Applied Surface Science . Dec2008, Vol. 255 Issue 4, p1415-1418. 4p. - Publication Year :
- 2008
-
Abstract
- Abstract: Reliability and yield of nano-electronic devices can be seriously affected by the presence of surface contamination, even at low concentration. The microelectronics industry is, thus, in need for a quantitative, highly sensitive surface analysis technique capable of detecting both elementary and molecular species present at the surface. Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) provides a submicronic lateral resolution and excellent sensitivity with high secondary ion yields on a broad mass range but, nevertheless, remains a qualitative technique. To convert normalized ion intensities into concentrations and, thus, to provide reliable quantification, the so-called relative sensitivity factors (RSFs) need to be determined. In earlier studies, ToF-SIMS RSFs for trace metals were determined from the calibration of ToF-SIMS positive ion intensities against quantitative analysis techniques able to determine a surface coverage such as vapour phase decomposition inductively coupled plasma mass spectrometry (VPD-ICP-MS) or total reflection X-ray fluorescence (TXRF) results. Here, the aim is to quantify elementary anionic minority species (S, Cl, P, Br). Deliberately contaminated samples were prepared and analyzed with ToF-SIMS and several quantitative surface analytical techniques like TXRF, liquid phase extraction ionic chromatography (LPE-IC) or VPD-ICP-MS. None of these latter techniques can by itself successfully handle all the anionic species cases and ToF-SIMS turns out to be the more versatile and precise characterization technique in this context. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 01694332
- Volume :
- 255
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Applied Surface Science
- Publication Type :
- Academic Journal
- Accession number :
- 35501069
- Full Text :
- https://doi.org/10.1016/j.apsusc.2008.06.045