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Structural characterization of Si...-...Ge... alloy layers grown by molecular beam epitaxy on Si(001) substrates.
- Source :
-
Journal of Applied Physics . 6/15/2000, Vol. 87 Issue 12, p8759. 7p. 19 Black and White Photographs, 2 Charts, 3 Graphs. - Publication Year :
- 2000
-
Abstract
- Presents information on a study which characterized residual strain, surface roughness and dislocations of alloy layers grown by molecular beam epitaxy on silicon(001) substrates. Experimental details; Results and discussion; Conclusions.
- Subjects :
- *RESIDUAL stresses
*SURFACE roughness
*MOLECULAR beam epitaxy
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 87
- Issue :
- 12
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 3490232
- Full Text :
- https://doi.org/10.1063/1.373607