Back to Search
Start Over
Conductor etch series.
- Source :
-
Solid State Technology . Aug2008, Vol. 51 Issue 8, p43-43. 1/4p. - Publication Year :
- 2008
-
Abstract
- The article evaluates the Kiyo3x series which includes improvements in wafer temperature control from Lam Research Corp.
- Subjects :
- *TEMPERATURE control
Subjects
Details
- Language :
- English
- ISSN :
- 0038111X
- Volume :
- 51
- Issue :
- 8
- Database :
- Academic Search Index
- Journal :
- Solid State Technology
- Publication Type :
- Academic Journal
- Accession number :
- 34206913