SPECTROSCOPIC STUDY ON DIFFUSION PHENOMENON OF THERMALLY ANNEALED Pt/TiOx ELECTRODE.

We have investigated variations of the spectroscopic composition due to thermal mixing on the surface and at the interface by thermal annealing of Pt/Ti and Pt/TiOx electrodes. We also have studied in detail, reaction and diffusion mechanism of these elements through the film for each separate electrode type. The electrode stacks were annealed by the rapid thermal annealing (RTA) system. Auger electron spectroscopy (AES) technique was used to investigate surface elemental distribution and depth profiles. We have also discussed morphological and structural behavior of these films. [ABSTRACT FROM AUTHOR]