Cite
A distributed MEMS phase shifter on a low-resistivity silicon substrate
MLA
Wang, Jianqun, et al. “A Distributed MEMS Phase Shifter on a Low-Resistivity Silicon Substrate.” Sensors & Actuators A: Physical, vol. 144, no. 1, May 2008, pp. 207–12. EBSCOhost, https://doi.org/10.1016/j.sna.2007.12.027.
APA
Wang, J., Ativanichayaphong, T., Huang, W.-D., Cai, Y., Davis, A., Chiao, M., & Chiao, J.-C. (2008). A distributed MEMS phase shifter on a low-resistivity silicon substrate. Sensors & Actuators A: Physical, 144(1), 207–212. https://doi.org/10.1016/j.sna.2007.12.027
Chicago
Wang, Jianqun, Thermpon Ativanichayaphong, Wen-Ding Huang, Ying Cai, Alan Davis, Mu Chiao, and J.-C. Chiao. 2008. “A Distributed MEMS Phase Shifter on a Low-Resistivity Silicon Substrate.” Sensors & Actuators A: Physical 144 (1): 207–12. doi:10.1016/j.sna.2007.12.027.