Sublimation TiN Coating of RF Power Components.

Titanium evaporation in a reactive atmosphere of ammonia has been chosen to deposit thin (up to 10 nm) protective surface layers containing titanium nitride and titanium oxinitrides which suppress secondary electron emission. The coating procedure, applied by the author in DESY (Hamburg) for TESLA couplers anti-multipactor protection, has been recently implemented in The Andrzej Soltan Institute for Nuclear Studies (IPJ) where a new coating device is used, equipped with a special titanium sublimation setup in a 100 1 vacuum chamber. Several arrays of cylindrical and coaxial RF coupler windows have been coated so far after optimizing the processing parameters. A check of the obtained surface layers ability to attenuate secondary electron emission has been performed; measurements of the secondary electron yield from TiN layers deposited on alumina samples were done in IPJ on as-delivered coated samples, then after vacuum bake-out and finally after additional electron bombardment of their surfaces. Also chemical composition of the surface layers has been studied using XPS in the Institute of Physical Chemistry (IChF). [ABSTRACT FROM AUTHOR]