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Structural and electrical characterization of microcrystalline silicon films prepared by a...
- Source :
-
Journal of Applied Physics . 2/15/2000, Vol. 87 Issue 4, p1676. 5p. 7 Graphs. - Publication Year :
- 2000
-
Abstract
- Presents a study which investigated the structural and electrical properties of microcrystalline silicon films prepared by a layer-by-layer technique with a plasma-enhanced chemical-vapor system. Potential applications of microcrystalline; Methodology used in the study; Results and discussion.
- Subjects :
- *MICROCRYSTALLINE polymers
*THIN films
*SILICON
*CHEMICAL structure
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 87
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 2815343
- Full Text :
- https://doi.org/10.1063/1.372076