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Effect of poly(vinyl acetate) on structures and properties of PbZr0.52Ti0.48O3 thick films.
- Source :
-
Journal of Applied Physics . Oct2007, Vol. 102 Issue 8, p084109. 4p. 1 Black and White Photograph, 1 Diagram, 1 Chart, 4 Graphs. - Publication Year :
- 2007
-
Abstract
- PbZr0.52Ti0.48O3 (PZT) thick films are prepared by a polymer-assisted metallo-organic compound decomposition process. The addition of a polymer, poly(vinyl acetate) (PVAc), in PZT precursor solutions promotes the formation of the perovskite phase. Meanwhile, the crack formation is effectively suppressed. The single-layer thickness of PZT films increases from 0.07 to 0.22 μm. It is found that PZT recrystallizes after the PVAc-related organic compounds are decomposed. Nanosized pores are observed in the morphological surfaces of PZT thick films. The crack-free PZT thick films with thickness of 1.3 μm by the repeated deposition exhibit good electrical properties with dielectric constant of 996, dielectric loss around of 3%, remanent polarization of 36.3 μC/cm2, and coercive field of 78.5 kV/cm, which are potential candidates for microelectromechanical system (MEMS) applications. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 102
- Issue :
- 8
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 27345146
- Full Text :
- https://doi.org/10.1063/1.2801095