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32 x 32 SOl CMOS Image Sensor with Pinned Photodiode on Handle Wafer.

Authors :
Yong-Soo Cho
Takao, H.
Sawada, K.
Ishida, M.
Sie-Yung Choi
Source :
Optical Review. May/Jun2007, Vol. 14 Issue 3, p125-130. 6p. 3 Black and White Photographs, 5 Diagrams, 5 Graphs.
Publication Year :
2007

Abstract

The article details the fabrication of a 32x32 silicon on insulator complementary metal oxide semiconductor active pixel image sensor with a pinned photodiode on a handle wafer. It describes the structure of one pixel which consists of a reset and a source follower transistor on a seed wafer. The article shows that photodiode could be optimized for better quantum efficiency and low dark currents.

Details

Language :
English
ISSN :
13406000
Volume :
14
Issue :
3
Database :
Academic Search Index
Journal :
Optical Review
Publication Type :
Academic Journal
Accession number :
25557757
Full Text :
https://doi.org/10.1007/BF02919412