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Micromachined Printheads for the Evaporative Patterning of Organic Materials and Metals.
- Source :
-
Journal of Microelectromechanical Systems . Apr2007, Vol. 16 Issue 2, p394-400. 7p. 5 Diagrams, 10 Graphs. - Publication Year :
- 2007
-
Abstract
- This paper describes the design, fabrication, and testing of electrostatically actuated microshutters used as active shadow masks to pattern evaporated materials. The fabricated microshutters can obstruct a 25-µm-wide aperture at an actuation voltage of 90 V, with a resonant frequency of 4 kHz due to a 400-µm-long actuator. The microshutters integrated with an x-y-z manipulator were used to print patterns of organic material and metal on glass substrates in vacuum with a pixel size of 25 µm. The maximum resolution achievable with this setup is 800 dpi, and we printed active organic light-emitting device arrays of 400 dpi resolution. This printing scheme could enable the patterning of large-area organic optoelectronic devices on diverse substrates. [ABSTRACT FROM AUTHOR]
- Subjects :
- *OPTOELECTRONIC devices
*ELECTRONIC equipment
*METALS
*MICROFABRICATION
*PRINTING
Subjects
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 16
- Issue :
- 2
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 25108703
- Full Text :
- https://doi.org/10.1109/JMEMS.2006.889660