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Fabrication and Preliminary Results for LiGA Fabricated Nickel Micro Gas Chromatograph Columns.
- Source :
-
Journal of Microelectromechanical Systems . Apr2007, Vol. 16 Issue 2, p383-393. 11p. 3 Diagrams, 7 Graphs. - Publication Year :
- 2007
-
Abstract
- High aspect ratio nickel microfluidic columns were fabricated using the LGA technique. The 2-m-long 50-µm-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-µm-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of ~15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within ±2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C6, C8, C10, and C12 was separated in a coated 50 µm by 600 µm by 0.5 m column in less than 2 s at 70 °C. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 16
- Issue :
- 2
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 25108702
- Full Text :
- https://doi.org/10.1109/JMEMS.2007.892903