Wavelength Tuning of Double-Cavity Micromachined Filter with Electrical and Thermal Actuations.

The article presents a study which demonstrates wavelength tuning of double-cavity micromachined filter with electrical and thermal actuations. The study aimed to realize widely tunable filters for use in optical communication sytems. Such concept is important for tunable vertical cavity surface emitting lasers. Researchers also presented the theoretical and measured temperature dependence of fabricated micromachined filter.