DIRECTIVITY OPTIMIZATION OF PZT BASED MICROSPEAKER ARRAY.

In this paper, the directivity is optimized for a PZT based microspeaker array. The SiO2/Pt/Pb(Zr,Ti)O3/Pt/Ti/SiO2 multimorph structure has been designed and fabricated to be the microspeaker cell using silicon based micro-machining process. The membrane size of the single transducer cell is 1000× 1000× 2.5 μ m3, and the main resonance frequency is located near 68 kHz (λ = 5 mm). Directivity is a very important parameter for microspeaker array. Dissimilar arrangement of the cells in transducer array could cause different directivity performance. After comparison, when achieving a good transmitting directivity, the square combined plane array has the smallest area. [ABSTRACT FROM AUTHOR]