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Fabrication of micro-mold for glass embossing using focused ion beam, femto-second laser, eximer laser and dicing techniques
- Source :
-
Journal of Materials Processing Technology . Jun2007, Vol. 187-188, p326-330. 5p. - Publication Year :
- 2007
-
Abstract
- Abstract: Various nano-/micro-structuring methods, including focused ion beam (FIB), femto-second laser, KrF eximer laser and dicing techniques, were used to fabricate glassy carbon (GC) micro-molds and were characterized in terms of the process rate, the roughness and the shape of machined structure. The combination of femto-second laser ablation with subsequent FIB milling provided a possibility for the rapid fabrication of high quality micro-structures on a wide surface area. Obtained molds were applied to the hot-emboss process of glasses to investigate process conditions needed for the replication of structures with various geometries and dimensions. [Copyright &y& Elsevier]
- Subjects :
- *FOCUSED ion beams
*ION bombardment
*INDUSTRIAL lasers
*LASER ablation
Subjects
Details
- Language :
- English
- ISSN :
- 09240136
- Volume :
- 187-188
- Database :
- Academic Search Index
- Journal :
- Journal of Materials Processing Technology
- Publication Type :
- Academic Journal
- Accession number :
- 24426685
- Full Text :
- https://doi.org/10.1016/j.jmatprotec.2006.11.120