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An analytical model of the material removal rate between elastic and elastic-plastic deformation for a polishing process.
- Source :
-
International Journal of Advanced Manufacturing Technology . Apr2007, Vol. 32 Issue 7/8, p675-681. 7p. 4 Charts, 4 Graphs. - Publication Year :
- 2007
-
Abstract
- This paper develops an analytical model for the material removal rate during specimen polishing. The model is based on the micro-contact elastic mechanics, micro-contact elastic-plastic mechanics and abrasive wear theory. The micro-contact elastic mechanics between the pad-specimen surfaces used the Greenwood and Williamson elastic model. The micro-contact elastic-plastic mechanics between specimen and particle, as well as the micro-contact elastic mechanics between particle and pad, are also analyzed. The cross-sectional area of the worn groove in the specimen is considered as trapezoidal area. A close-form solution of material removal rate from the specimen surface is the function of average diameter of slurry particles, pressure, the specimen/pad sliding velocity, Equivalent Young’s modulus, RMS roughness of the pad, and volume concentration of the slurry particle. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 02683768
- Volume :
- 32
- Issue :
- 7/8
- Database :
- Academic Search Index
- Journal :
- International Journal of Advanced Manufacturing Technology
- Publication Type :
- Academic Journal
- Accession number :
- 24363024
- Full Text :
- https://doi.org/10.1007/s00170-005-0391-4