Cite
Atomic Layer Deposition of Molybdenum Nitride from Bis(tert-butylimido)-bis(dimethylamido)molybdenum and Ammonia onto Several Types of Substrate Materials with Equal Growth per Cycle.
MLA
Ville Miikkulainen, et al. “Atomic Layer Deposition of Molybdenum Nitride from Bis(Tert-Butylimido)-Bis(Dimethylamido)Molybdenum and Ammonia onto Several Types of Substrate Materials with Equal Growth per Cycle.” Chemistry of Materials, vol. 19, no. 2, Jan. 2007, pp. 263–69. EBSCOhost, https://doi.org/10.1021/cm0620279.
APA
Ville Miikkulainen, Mika Suvanto, & Tapani A. Pakkanen. (2007). Atomic Layer Deposition of Molybdenum Nitride from Bis(tert-butylimido)-bis(dimethylamido)molybdenum and Ammonia onto Several Types of Substrate Materials with Equal Growth per Cycle. Chemistry of Materials, 19(2), 263–269. https://doi.org/10.1021/cm0620279
Chicago
Ville Miikkulainen, Mika Suvanto, and Tapani A. Pakkanen. 2007. “Atomic Layer Deposition of Molybdenum Nitride from Bis(Tert-Butylimido)-Bis(Dimethylamido)Molybdenum and Ammonia onto Several Types of Substrate Materials with Equal Growth per Cycle.” Chemistry of Materials 19 (2): 263–69. doi:10.1021/cm0620279.