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Integrated cantilever sensors with a torsional resonance mode for ultraresoluble on-the-spot bio/chemical detection.
- Source :
-
Applied Physics Letters . 1/22/2007, Vol. 90 Issue 4, p041901-N.PAG. 3p. 2 Diagrams, 1 Graph. - Publication Year :
- 2007
-
Abstract
- Torsion-mode resonance is built in an integrated cantilever sensor for ultraresoluble detection of specifically bio/chemical mass adsorption. The superior mass resolution of the torsion-mode cantilever to a conventional bending-mode one is verified by energy-dissipation analysis and Q-factor simulation. With integrated transverse piezoresistance for frequency-shift signal readout and Lorentz force for resonance excitation, the torsion-mode sensor is optimally designed for high sensitivity. The microfabricated torsion-mode sensor is measured with a high close-loop Q factor in air. By Allan-variance analysis for the measured frequency stability, 23 fg resolution is obtained for the torsion-mode sensor, which is much improved compared to the 313 fg for the conventional flexure-mode sensor. The torsional sensor is used to recognize biotin-avidin specific combination, resulting in 443 Hz frequency shift for 50 μM streptavidin solution. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 90
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 23907045
- Full Text :
- https://doi.org/10.1063/1.2433753