Characterization of 4H-SiC grown on AlN/Si(100) by CVD

MLA

Qin, Z., et al. “Characterization of 4H-SiC Grown on AlN/Si(100) by CVD.” Thin Solid Films, vol. 515, no. 2, Oct. 2006, pp. 580–82. EBSCOhost, https://doi.org/10.1016/j.tsf.2005.12.173.

APA

Qin, Z., Han, P., Han, T. T., Yan, B., Jiang, N., Xu, S., Shi, J., Zhu, J., Xie, Z. L., Xiu, X. Q., Gu, S. L., Zhang, R., & Zheng, Y. D. (2006). Characterization of 4H-SiC grown on AlN/Si(100) by CVD. Thin Solid Films, 515(2), 580–582. https://doi.org/10.1016/j.tsf.2005.12.173

Chicago

Qin, Z., P. Han, T.T. Han, B. Yan, N. Jiang, S. Xu, J. Shi, et al. 2006. “Characterization of 4H-SiC Grown on AlN/Si(100) by CVD.” Thin Solid Films 515 (2): 580–82. doi:10.1016/j.tsf.2005.12.173.