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Structural tailoring of multilayer porous silicon for photonic crystal application
- Source :
-
Journal of Crystal Growth . Jul2006, Vol. 292 Issue 2, p347-350. 4p. - Publication Year :
- 2006
-
Abstract
- Abstract: The 1D photonic crystals based on multilayer porous silicon are reported in this paper. The photonic structures are composed of alternating high and low dielectric function porous silicon layers by changing the porosity of porous silicon with a periodic electric pulse alternating between 10.0 and 70.0mA/cm2 during anodization on p+-type (100) silicon wafer with resistance range 0.01–0.02Ωcm. Omni-directional mirrors as well as narrow band filters working in the range around 1.55μm are designed and fabricated. Photonic crystal with such a structure exhibits high quality of filter behavior. [Copyright &y& Elsevier]
- Subjects :
- *SILICON
*POROUS silicon
*SEMICONDUCTOR wafers
*SEMICONDUCTORS
Subjects
Details
- Language :
- English
- ISSN :
- 00220248
- Volume :
- 292
- Issue :
- 2
- Database :
- Academic Search Index
- Journal :
- Journal of Crystal Growth
- Publication Type :
- Academic Journal
- Accession number :
- 21578030
- Full Text :
- https://doi.org/10.1016/j.jcrysgro.2006.04.033