Back to Search
Start Over
Second-order aberration corrected electron energy loss spectroscopy attachment for scanning electron microscopes.
- Source :
-
Review of Scientific Instruments . Apr2006, Vol. 77 Issue 4, p043103. 6p. 2 Diagrams, 6 Graphs. - Publication Year :
- 2006
-
Abstract
- At present transmission electron energy loss spectrum (EELS) analysis is only carried out in dedicated research instruments such as transmission electron microscopes (TEMs) or scanning transmission electron microscopes. This article presents a new design of second-order geometric aberration corrected EELS spectrometer attachment using split plates, which enables conventional scanning electron microscopes (SEMs) to provide TEM-like EELS spectra. Correction to a third-order dominant geometric aberration pattern has been achieved, which indicates that most of the second-order geometric aberration component is eliminated. This second-order aberration corrected spectrometer attachment design can enable SEMs to provide transmission EELS spectrums. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 77
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 20736179
- Full Text :
- https://doi.org/10.1063/1.2190208