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Design study of piezoelectric micro-machined mechanically coupled cantilever filters using a combined finite element and microwave circuit analysis
- Source :
-
Sensors & Actuators A: Physical . Feb2006, Vol. 126 Issue 2, p417-424. 8p. - Publication Year :
- 2006
-
Abstract
- Abstract: A new mechanical filter structure is presented which comprises two silicon cantilevers mechanically coupled by a silicon linkage with thin film piezoelectric transducers providing electrical input and output signals. The resonance behaviour of such a structure results in a band-pass filter response, having a band-width determined by the frequency separation between the closely spaced in-phase and out-of-phase vibrational modes of the two coupled cantilevers. A detailed configuration design analysis, filter simulation and optimisation of performance is undertaken using a new modelling approach combining microwave circuit theory and finite element analysis to evaluate the generalised (A, B, C and D) and scattering (S) circuit parameters of the filter. Two significant features of the filters have emerged from the derived analyses and simulations: (1) with correct design filter Q-values can reach several thousand which is much higher than the Q-values (∼80) of uncoupled cantilevers, (2) the Q-value is determined by the configuration of the silicon linkage and so is under the designer''s control. The position and length of the linkage that give optimum Q and minimum insertion loss are determined. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 09244247
- Volume :
- 126
- Issue :
- 2
- Database :
- Academic Search Index
- Journal :
- Sensors & Actuators A: Physical
- Publication Type :
- Academic Journal
- Accession number :
- 19590089
- Full Text :
- https://doi.org/10.1016/j.sna.2005.10.027