Cite
Patterning large-area devices with a 5:1 reduction stepper
MLA
Leinonen, Kari. “Patterning Large-Area Devices with a 5:1 Reduction Stepper.” Nuclear Instruments & Methods in Physics Research Section A, vol. 555, no. 1/2, Dec. 2005, pp. 59–64. EBSCOhost, https://doi.org/10.1016/j.nima.2005.09.004.
APA
Leinonen, K. (2005). Patterning large-area devices with a 5:1 reduction stepper. Nuclear Instruments & Methods in Physics Research Section A, 555(1/2), 59–64. https://doi.org/10.1016/j.nima.2005.09.004
Chicago
Leinonen, Kari. 2005. “Patterning Large-Area Devices with a 5:1 Reduction Stepper.” Nuclear Instruments & Methods in Physics Research Section A 555 (1/2): 59–64. doi:10.1016/j.nima.2005.09.004.