Improvement of leakage and fatigue properties of Hf0.5Zr0.5O2 thin film by embedding ultra-thin Al2O3 interlayer.

MLA

Wang, Dao, et al. “Improvement of Leakage and Fatigue Properties of Hf0.5Zr0.5O2 Thin Film by Embedding Ultra-Thin Al2O3 Interlayer.” Journal of Materials Science, vol. 60, no. 1, Jan. 2025, pp. 328–38. EBSCOhost, https://doi.org/10.1007/s10853-024-10527-5.

APA

Wang, D., Lu, Z., Wang, J., Sun, Y., Zhang, Y., & He, D. (2025). Improvement of leakage and fatigue properties of Hf0.5Zr0.5O2 thin film by embedding ultra-thin Al2O3 interlayer. Journal of Materials Science, 60(1), 328–338. https://doi.org/10.1007/s10853-024-10527-5

Chicago

Wang, Dao, Zihao Lu, Jianing Wang, Yabing Sun, Yan Zhang, and Danfeng He. 2025. “Improvement of Leakage and Fatigue Properties of Hf0.5Zr0.5O2 Thin Film by Embedding Ultra-Thin Al2O3 Interlayer.” Journal of Materials Science 60 (1): 328–38. doi:10.1007/s10853-024-10527-5.