High-precision displacement sensor in advanced manufacturing: Principle and application.

Ultraprecision machining extensively utilizes high-precision displacement sensors due to their exceptional stability, sensitivity, and accuracy. Such sensors can directly measure displacement but are typically components of precision measurement systems, such as atomic force microscopes, profilometers, or coordinate measuring machines. Currently, as displacement sensors are moving towards the direction of high precision, large range, and universal applicability, the market has seen a large variety of new displacement sensor products. However, there is a dearth of comprehensive and systematic reviews of their application specifically in the field of ultraprecision inspection. This review discusses existing research on typical contact and noncontact displacement sensors in high-precision machine tools. First, it reviews and classifies the displacement sensors. Then, it introduces the principles, characteristics, and applications of these types of sensors, along with the technical indicators of their corresponding commercial sensors, and discusses the latest advances in related technologies. Moreover, it also presents a comprehensive summary and comparative study of various high-precision displacement sensors from the perspectives of measurement range, accuracy, resolution, and applicability. Finally, it discusses the technical obstruction and development trends of high-precision displacement sensors. [ABSTRACT FROM AUTHOR]