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Crystal structure characterization of ion-beam-synthesized Co...Y...Si... silicide.
- Source :
-
Journal of Applied Physics . 5/1/1999, Vol. 85 Issue 9, p6929. 3p. 3 Graphs. - Publication Year :
- 1999
-
Abstract
- Presents information on a study of heteroepitaxial ternary cobalt(Co)...yttrium(Y)...silicon(Si)... silicide formed by Co implantation into YSi...Si. Use of metal silicides in microelectronics; Application of Rutherford backscattering; Use of x-ray diffraction to determine compounds present in the sample.
- Subjects :
- *EPITAXY
*COBALT
*YTTRIUM
*SILICON
*SILICIDES
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 85
- Issue :
- 9
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 1815924
- Full Text :
- https://doi.org/10.1063/1.370108