Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry.

MLA

Li, Jinyang, and Hung-Fei Kuo. “Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry.” IEEE Transactions on Semiconductor Manufacturing, vol. 37, no. 4, Nov. 2024, pp. 518–26. EBSCOhost, https://doi.org/10.1109/TSM.2024.3448458.

APA

Li, J., & Kuo, H.-F. (2024). Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry. IEEE Transactions on Semiconductor Manufacturing, 37(4), 518–526. https://doi.org/10.1109/TSM.2024.3448458

Chicago

Li, Jinyang, and Hung-Fei Kuo. 2024. “Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry.” IEEE Transactions on Semiconductor Manufacturing 37 (4): 518–26. doi:10.1109/TSM.2024.3448458.