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Characterization of Ultrathin Conductive Films Using a Simplified Approach for Terahertz Time-Domain Spectroscopic Ellipsometry.
- Source :
-
Journal of Infrared, Millimeter & Terahertz Waves . Dec2024, Vol. 45 Issue 11/12, p949-966. 18p. - Publication Year :
- 2024
-
Abstract
- We present two ideas to simplify the measurement and analysis of terahertz time-domain spectroscopic ellipsometry data of ultrathin films. The measurement is simplified by using a specially designed sample holder with mirrors, which can be mounted on a cryostat. It allows us to perform spectroscopic ellipsometry by simply inserting the holder into a conventional terahertz spectroscopy system for measurements in transmission geometry. The analysis of the obtained data is simplified by considering a single interface with a certain sheet conductivity σ s (since the film thickness is significantly smaller than the wavelength of the terahertz light). We demonstrate the application of these ideas by evaluating the sheet conductivities of two perovskite rare-earth nickelate thin films in the temperature range 78–478 K. The use of this particular analytical method and the sample holder design will help to establish terahertz time-domain spectroscopic ellipsometry as a characterization technique for ultrathin films. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 18666892
- Volume :
- 45
- Issue :
- 11/12
- Database :
- Academic Search Index
- Journal :
- Journal of Infrared, Millimeter & Terahertz Waves
- Publication Type :
- Academic Journal
- Accession number :
- 180804642
- Full Text :
- https://doi.org/10.1007/s10762-024-01011-x