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Characterization of Ultrathin Conductive Films Using a Simplified Approach for Terahertz Time-Domain Spectroscopic Ellipsometry.

Authors :
Nagai, Masaya
Watanabe, Sou
Imamura, Ryosuke
Ashida, Masaaki
Shimoyama, Kohei
Li, Haobo
Hattori, Azusa N.
Tanaka, Hidekazu
Source :
Journal of Infrared, Millimeter & Terahertz Waves. Dec2024, Vol. 45 Issue 11/12, p949-966. 18p.
Publication Year :
2024

Abstract

We present two ideas to simplify the measurement and analysis of terahertz time-domain spectroscopic ellipsometry data of ultrathin films. The measurement is simplified by using a specially designed sample holder with mirrors, which can be mounted on a cryostat. It allows us to perform spectroscopic ellipsometry by simply inserting the holder into a conventional terahertz spectroscopy system for measurements in transmission geometry. The analysis of the obtained data is simplified by considering a single interface with a certain sheet conductivity σ s (since the film thickness is significantly smaller than the wavelength of the terahertz light). We demonstrate the application of these ideas by evaluating the sheet conductivities of two perovskite rare-earth nickelate thin films in the temperature range 78–478 K. The use of this particular analytical method and the sample holder design will help to establish terahertz time-domain spectroscopic ellipsometry as a characterization technique for ultrathin films. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
18666892
Volume :
45
Issue :
11/12
Database :
Academic Search Index
Journal :
Journal of Infrared, Millimeter & Terahertz Waves
Publication Type :
Academic Journal
Accession number :
180804642
Full Text :
https://doi.org/10.1007/s10762-024-01011-x