Influence of the spatial position of the sample on PVD coatings properties.

The location of the sample in the chamber affects the parameters of the deposited coating. Two varieties of the physical vapor deposition (PVD) method, controlled accelerated arc-physical vapor deposition (CAA-PVD) and commercial arc PVD technology, were compared. In the process of research, two parameters of the spatial arrangement were changed: the distance from the sample to the cathode surface and the displacement of the sample relative to the central axis of the cathode. The concentration of microparticles on the surface, the thickness of the coating, as well as its hardness, depending on the location of the sample, were studied. The CAA-PVD technique makes it possible to provide equal coating quality at a shorter distance from the cathode. Thus, the useful volume of the chamber is noticeably increased, which, in turn, makes it possible to increase the productivity of the process. Alternatively, while maintaining the distance from the cathode to the sample, a better-quality coating can be obtained (in particular, from 30% to 270% reduces the concentration of microparticles on the surface of the coating). [ABSTRACT FROM AUTHOR]