Ion and neutral scattering spectra in LEIS

Abstract: Low energy ions scattering (LEIS) set-ups equipped with a time-of-flight (TOF) detection system can achieve an experimental resolution <1% for He ions at an energy of about 1keV, corresponding to sub-monolayer depth resolution. Furthermore, spectra of scattered neutrals reveal interesting information on the electronic interaction of the projectiles with the sample. We compare experimental TOF-LEIS spectra to Monte-Carlo simulations (MARLOWE) and discuss what one can learn from this comparison about elastic scattering (single scattering versus multiple scattering), about inelastic scattering (local versus non-local electronic energy loss) and about typical trajectories (validity of single scattering model, information depth). Our present understanding of ion and neutral scattering spectra in LEIS is discussed along these lines and results are presented for scattering of He+ ions from polycrystalline Au. [Copyright &y& Elsevier]