The measurement and impact of negative oxygen ions during reactive sputter deposition.

MLA

Depla, D. “The Measurement and Impact of Negative Oxygen Ions during Reactive Sputter Deposition.” Critical Reviews in Solid State & Materials Science, vol. 49, no. 4, July 2024, pp. 718–53. EBSCOhost, https://doi.org/10.1080/10408436.2023.2258159.

APA

Depla, D. (2024). The measurement and impact of negative oxygen ions during reactive sputter deposition. Critical Reviews in Solid State & Materials Science, 49(4), 718–753. https://doi.org/10.1080/10408436.2023.2258159

Chicago

Depla, D. 2024. “The Measurement and Impact of Negative Oxygen Ions during Reactive Sputter Deposition.” Critical Reviews in Solid State & Materials Science 49 (4): 718–53. doi:10.1080/10408436.2023.2258159.