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A two-dimensional calibration for resolving nano-positioner pedestal micro-deformation crosstalk.

Authors :
Chen, Guangzheng
Fan, Kai
Niu, Runda
Zhu, Shuyu
Xu, Tao
Feng, Zhihua
Source :
Review of Scientific Instruments. Jul2024, Vol. 96 Issue 7, p1-11. 11p.
Publication Year :
2024

Abstract

This paper proposes a two-dimensional calibration method for resolving the nano-positioner pedestal micro-deformation crosstalk errors during the auction process. This refinement aims to enhance the nano-positioner's accuracy and reduce coupling crosstalk errors. The reaction force exerted by the piezoelectric actuator can cause micro-deformation in the nano-positioner sensor pedestal, causing substantial errors in uncalibrated closed-loop control. This phenomenon has been previously overlooked. According to the two-degree of freedom parallel-symmetric decoupled nano-positioner deformation characteristics, a two-dimensional calibration matrix is proposed to suppress the crosstalk between two axes caused by the micro-deformation of the sensor pedestal. Experimental results show that the calibrated closed-loop system reduces X-axis and Y-axis coupling crosstalk errors to 1/67th and 1/18th of the uncalibrated closed-loop system, respectively, concurrently enhancing the positioning accuracy to 11.8 and 17 times that of the uncalibrated closed-loop system. The calibrated closed-loop feedback control method proposed in this paper proves effective for all compact nano-positioners with pedestal deformation issues. This research provides a crucial reference for the design of nano-positioners, offering insights into enhancing their accuracy and mitigating crosstalk issues. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00346748
Volume :
96
Issue :
7
Database :
Academic Search Index
Journal :
Review of Scientific Instruments
Publication Type :
Academic Journal
Accession number :
178780706
Full Text :
https://doi.org/10.1063/5.0202296