Microelectronic Thermobiosensors.

The paper presents the results of research of properties of LaLiTiO 3 and β-Al 2 O 3 thin films for miniature thermobiosensors. The available thermoelectric semiconductor converters are not sensitive enough for registration of slight quantities of heat during biochemical reactions in the region of low-potential temperature differences. For this, we prepared new thin-film materials LaLiTiO 3 and β-Al 2 O 3 and studied their thermal and electrical properties. These materials are solid electrolytes with superionic conductivity. The vacuum methods of “explosive” evaporation and magnetron sputtering were used for depositing the films. For the first time thin films of β-Al 2 O 3 and LaLiTiO 3 were used as sensor based electrical converters for measuring the concentration of glucose, urine and heavy metal ions. [ABSTRACT FROM AUTHOR]