Fabrication and characterization of HfxAl(1-x)Oy ceramic targets and thin films by RF sputtering.

MLA

Hong, In Pyo, et al. “Fabrication and Characterization of HfxAl(1-x)Oy Ceramic Targets and Thin Films by RF Sputtering.” Ceramics International, vol. 50, no. 17, Sept. 2024, pp. 30963–69. EBSCOhost, https://doi.org/10.1016/j.ceramint.2024.05.401.

APA

Hong, I. P., He, R., & Bark, C. W. (2024). Fabrication and characterization of HfxAl(1-x)Oy ceramic targets and thin films by RF sputtering. Ceramics International, 50(17), 30963–30969. https://doi.org/10.1016/j.ceramint.2024.05.401

Chicago

Hong, In Pyo, Rui He, and Chung Wung Bark. 2024. “Fabrication and Characterization of HfxAl(1-x)Oy Ceramic Targets and Thin Films by RF Sputtering.” Ceramics International 50 (17): 30963–69. doi:10.1016/j.ceramint.2024.05.401.