Low voltage micro electro mechanical systems gas sensor for smart industrial smart applications.

Gas sensors are beneficial in a wide range of applications, including environment monitoring, industrial, and safety. Ideal characteristics of the desired gas sensor include low cost, and low power usage. The major advancement was, the role of alloy material as heating aliment was analyzed, and presented a gas sensor with nichrome as heating element. The ZnO semiconductor metal oxide was used as sensing material. The presented sensor was designed and simulated using FEM tool. The required micro heater bias voltage is reduced. And the ZnO sensing material resistance vs thermal conductivity was analyzed. [ABSTRACT FROM AUTHOR]