Cite
Extracting focus variation data from coherence scanning interferometric measurements.
MLA
Liu, Jiayu, et al. “Extracting Focus Variation Data from Coherence Scanning Interferometric Measurements.” Precision Engineering, vol. 88, June 2024, pp. 699–706. EBSCOhost, https://doi.org/10.1016/j.precisioneng.2024.04.016.
APA
Liu, J., Hooshmand, H., Piano, S., Leach, R., Coupland, J., Ren, M., Zhu, L., & Su, R. (2024). Extracting focus variation data from coherence scanning interferometric measurements. Precision Engineering, 88, 699–706. https://doi.org/10.1016/j.precisioneng.2024.04.016
Chicago
Liu, Jiayu, Helia Hooshmand, Samanta Piano, Richard Leach, Jeremy Coupland, Mingjun Ren, Limin Zhu, and Rong Su. 2024. “Extracting Focus Variation Data from Coherence Scanning Interferometric Measurements.” Precision Engineering 88 (June): 699–706. doi:10.1016/j.precisioneng.2024.04.016.