Design of Hybrid Bandpass Filter Chips with High Selectivity and Wideband Using IPD and FBAR Technology.

A novel hybrid bandpass filter (BPF) with wideband and high selectivity is proposed in this paper. The hybrid BPF is composed of two film bulk acoustic resonator (FBAR) cells and three lumped component resonators realized by the integrated passive device (IPD) technology. The ABCD matrix to S-parameters matrix method is used to calculate the frequency response of the BPF. Moreover, the expressions of transmission zeros (TZs) have been extracted. In the design process, an iterative design approach is proposed to improve the circuit and layout of the hybrid filter based on the packaged acoustic-electric hybrid simulation effect. Finally, two parts of the filter are packaged based on the flip-chip method, and two prototypes for the BPF are measured. The measured results of two chips with 3 dB fractional bandwidth of 13.7% and 15.8% are designed and fabricated, which verifies the validity of the proposed design principle. [ABSTRACT FROM AUTHOR]