The structure and properties of high-entropy (MoTaNbZrHf)-Si-B coatings deposited by DCMS and HIPIMS methods using the multilayer target.

This article reports the results of comparative studies of the composition, structure, high-temperature oxidation resistance, mechanical and tribological properties of (MoTaNbZrHf)-Si-B coatings prepared at an identical average power of 1 kW by direct current magnetron sputtering (DCMS) and high-power impulse magnetron sputtering (HIPIMS). Switching from the DCMS to the HIPIMS mode is found to increase adhesion and crack resistance of the coatings and their wear resistance under friction sliding and cyclic impact conditions, as well as reduce the depth of oxidation at 1300 °C threefold. The record-breaking values of high-temperature oxidation resistance at 1500 °C are achieved due to formation of a surface film based on the borosilicate glass (a-Si:B:O) containing crystallites of the t-HfSiO 4 , o-Ta 2 O 5 , m-HfO 2 , and m-ZrO 2 phases. [Display omitted] • A multilayer target with a (MoTaNbZrHf)-Si-B working layer was produced. • DCMS and HIPIMS coatings exhibited a hardness of 13–14 GPa. • The transition from DCMS to HIPIMS improves crack- and wear resistance. • The coatings demonstrated high oxidation resistance at 1100–1500 °C. [ABSTRACT FROM AUTHOR]