MEMS miniaturized low-noise magnetic field sensor for the observation of sub-millihertz magnetic fluctuations in space exploration.

The objective of this paper is to show that, using magnetic field modulation with a MEMS resonator, it is possible to reduce the noise floor of a commercial Tunneling Magnetic Resistance by one order of magnitude, in the ultra-low frequency range. Low noise at this frequency range is a strong requirement in planetary or space exploration missions like LISA (Laser Interferometer Space Antenna), where the observed gravitational waves will be in the 0.1 mHz to 0.1 Hz range. It will be shown that the noise spectral amplitude after demodulation from 0.1 mHz to 100 mHz is well below the 100 nT/ Hz requirement for the future space-borne gravitational wave detector LISA – that we take as reference – being at 20 nT/ Hz at 0.1 mHz, and reaching an average 1.5 nT / Hz at higher frequencies, from 100 mHz to 1 Hz. [Display omitted] • Implementation of magnetic field modulation on a TMR using a MEMS cantilever. Implementation of a Movable Magnetic Flux Concentrator on a MEMS cantilever for magnetic field modulation. • Noise model with all elements in the modulation and signal conditioning chain. • Demonstrated to fulfill the requirements of the LISA magnetic diagnostic subsystem. [ABSTRACT FROM AUTHOR]